Simulation Study of Methanol Exposures in the Semiconductor Industry
Methanol has been used in the semiconductor industry for many years as a wafer-cleaning solvent during quality control evaluations. Cardno ChemRisk was retained to quantitatively characterize the acute and chronic airborne concentrations of methanol during the hand-cleaning of wafers through both modeling and simulation studies. The results of this study were published in the peer-reviewed literature (see Gaffney et al. 2008).